Anhui Actus Technology - Flexure Hinge Stages

Supports multi-axis motion, incorporates built-in high-precision capacitive sensors for nanoscale position control, and enables customized design.

ALL Single axis platform Dual axis table Multi axis platform Mirror stage

PJ101~105

Single-Axis Piezo Flexure Stage

Closed-Loop Stroke: 100μm / 500μm optional

Resolution: Up to 0.5nm

Built-in Capacitive Sensor

Linearity Error: 0.02% FS

PJ12015

Compact High-Dynamic Single-Axis Piezo Flexure Stage

Closed-Loop Stroke: 15μm

Resolution: 0.3nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

PJ12015-S

Miniature Single-Axis Piezo Stage

Closed-Loop Stroke: 15μm

Resolution: 0.5nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

PJ2025

Z-Axis Piezo Flexure Stage

Closed-Loop Stroke: 250 µm

Resolution: 0.3 nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

PJ201

Compact Z-Axis Piezo Flexure Stage

Closed-Loop Stroke: 100μm

Resolution: 1nm

Linearity Error: 0.03% FS

Embedded mounting hole design

PJ2220

High-Load Single-Axis Piezo Flexure Stage

Closed-Loop Stroke: 200 μm

Resolution: 1 nm

Built-in Capacitive Sensor Linearity: 0.03% FS

PJ3203

XY-Axis Eccentric Piezo Stage

Closed-loop stroke: 30 µm

Linearity error: 0.03% FS

Load resonant frequency with 100g load: 1100 Hz

PJ3118

Compact Hollow XY Piezo Flexure Stage

Closed-Loop Stroke: 180×180 μm

Resolution: 2 nm

Built-in Capacitive Sensor

Linearity Error: 0.02% FS

PJ3006

Dual-Axis High-Dynamic Piezo Flexure Stage

Closed-Loop Stroke: 60×60 μm

Resolution: 0.4 nm

Built-in Capacitive Sensor

Linearity Error: 0.04% FS

PJ30x

XYθz Multi-axis Piezo Flexure Stage

Closed-Loop Stroke: 100–150 μm (optional)

Maximum Tilt Angle: 2 mrad

Displacement Resolution: 1 nm

Angular Resolution: 0.2 μrad

Linearity Error: 0.03% FS

PJ6024

Hollow Three-Axis Piezo Flexure Tip-Tilt Stage

Closed-Loop Z-Axis Stroke: 240 μm

Closed-Loop Rx, Ry Stroke: 2 mrad

Resolution: 2 nm

Built-in Capacitive Sensor

PJ511-3

XYZ Three-Axis Piezo Flexure Stage

X, Y Closed-Loop Stroke: 100μm

Z-Axis Closed-Loop Stroke: 15μm

Three-Axis Hollow Design

Nanometer-Level Resolution

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