Anhui Actus Technology- PJ101、PJ105 Single-Axis Piezo Flexure Stage

PJ101~105 Single-Axis Piezo Flexure Stage

Nanometer-level position control 、Built-in high-precision capacitive sensor

One-dimensional precision flexible hinge guidance ensures motion straightness.

It adopts a flexible hinge amplification mechanism optimized through finite element analysis (FEA).

The surface is treated with black anodization, and the mounting surfaces are conductively processed.

A capacitive sensor directly measures the relative displacement between the stator and the rotor.

Product Overview
Product Specifications
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Product Overview

• High-precision one-dimensional X-axis nanopositioning stage.

• It supports customization of different motion strokes, with the stroke ranging from 50 μm to 500 μm.

• Equipped with a built-in capacitive sensor, it achieves a linearity of 0.02% FS under closed-loop motion.

• Featuring a compact and solid non-hollow design, it realizes a small volume combined with a large stroke.

Application field

Nanopositioning

Semiconductor Inspection

Interferometry

Microscopy Imaging

Biotechnology

Nanopositioning

Semiconductor Inspection

Interferometry

Microscopy Imaging

Biotechnology

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ101~105 Single-Axis Piezo Flexure Stage

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