Anhui Actus Technology-PJ12015S Miniature Single-Axis Piezo Stage

PJ12015-S Miniature Single-Axis Piezo Stage

Nanometer-level position control 、Built-in high-precision capacitive displacement sensor、 Millisecond response time

Closed-Loop Travel: 15 µm

Resolution: 0.5 nm

Built-in Sensor Linearity: 0.03% FS

Product Overview
Product Specifications
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Product Overview

• The PJ12015-S is a compact, single-axis piezoelectric stage.

• Its compact structure makes it suitable for applications in confined spaces.

• It adopts a direct-drive design, resulting in high dynamic performance.

• It offers versatile mounting options, including horizontal, vertical, and inverted orientations.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ12015-S Miniature Single-Axis Piezo Stage

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