Anhui Actus Technology-PJ3118 Compact Hollow XY Piezo Flexure Stage

PJ3118 Compact Hollow XY Piezo Flexure Stage

Compact hollow design ,Nanometer-level position control ,Built-in high-precision capacitive sensor

Closed-Loop Stroke: 180×180 μm

Resolution: 2 nm

Built-in Capacitive Sensor

Linearity Error: 0.02% FS

Product Overview
Product Specifications
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Product Overview

• The PJ3118 Piezoelectric Stage is a compact XY two-axis hollow nanopositioning stage.

• It maintains a compact structure while still achieving a travel range at the hundred-micrometer level.

• It boasts nanometer-level resolution and high-speed dynamic response capability.

• It supports the ID chip function, eliminating the need for recalibration when replacing the motion stage components.

Application field

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ3118 Compact Hollow XY Piezo Flexure Stage

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