Anhui Actus Technology-PJ201 Compact Z-Axis Piezo Flexure Stage

PJ201 Compact Z-Axis Piezo Flexure Stage

Nanometer-level position contro、l Built-in high-precision capacitive sensor、 Precision vertical positioning

The PJ201 is a piezoelectric stage featuring a compact size and a large travel range.

It incorporates a high-precision capacitive displacement sensor, with a closed-loop linearity of less than 0.03% FS.

The embedded mounting hole design further minimizes the overall size of the motion platform.

Product Overview
Product Specifications
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Product Overview

• A multi-degree-of-freedom error suppression design further controls pitch and yaw.

• Flexure hinges enable friction-free, high-precision displacement guidance, achieving nanometer-level position control.

• Its compact structure and small size make it suitable for systems with limited space.

Application field

Biomedical Imaging

Semiconductor Inspection

Optical Precision Alignment

Biomedical Imaging

Semiconductor Inspection

Optical Precision Alignment

Product Features

Utilizes a flexure hinge system

使用柔性铰链减小物镜偏摆耦合。柔性铰链系统可实现无摩擦的高精度位移导向，实现纳米级位置控制，同时在极高频率的运动下也不会出现磨损，有较高的使用寿命，无需维护。

Built-in high-precision capacitive sensor

The built-in capacitive sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Optimized Pitch and Yaw Performance

Compared to traditional Z-axis stages, the PJ201 further reduces pitch and yaw errors through optimized structural design and mechanical assembly, enabling more precise Z-axis motion.

PJ201 Compact Z-Axis Piezo Flexure Stage

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