Anhui Actus Technology-PJ2220 High-Load Single-Axis Piezo Flexure Stage

PJ2220 High-Load Single-Axis Piezo Flexure Stage

Nanometer-level position control 、Built-in high-precision capacitive displacement sensor、 Millisecond response time

One-dimensional precision flexure hinge guidance ensures motion straightness.

The adoption of a high-stiffness flexure hinge amplification mechanism ensures high dynamics and load capacity.

The surface is treated with black anodization, and the mounting surfaces are conductively treated.

A capacitive sensor directly measures the relative displacement between the stator and the mover, resulting in higher precision.

Product Overview
Product Specifications
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Product Overview

• The PJ2220 is a high-precision, large-load, single-axis (X-direction) nano-positioning stage.

• It supports customization of travel ranges, which cover 50~300 μm.

• Incorporating a built-in capacitive sensor, it achieves a linearity of 0.03% FS under closed-loop motion.

• It can be installed horizontally, vertically, or inverted, and offers a customizable hollow design.

• Featuring high dynamics and a maximum load capacity of 5kg, it is suitable for objective lens module focusing or sample scanning.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ2220 High-Load Single-Axis Piezo Flexure Stage

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