Interferometry-PJ3006 Dual-Axis High-Dynamic Piezo Flexure Stage

PJ3006 Dual-Axis High-Dynamic Piezo Flexure Stage

X and Y two-axis motion High-dynamic performance Nanometer-level position control Built-in high-precision capacitive sensor

Large through-hole design to meet light transmission requirements.

Black anodization process with conductive treatment on mounting surfaces.

Capacitive sensor directly measures the relative displacement between the mover and stator for higher precision.

High-stiffness flexure hinge amplification mechanism ensures high dynamics and load capacity.

Product Overview
Product Specifications
Download materials

Product Overview

• The PJ3006 Piezoelectric Stage is an XY two-axis high-dynamic hollow nanopositioning stage.

• It supports customization of different motion travels, with the travel range covering 30–300 µm.

• Adopting a parallel kinematic design, it features faster response speed and higher multi-axis precision.

• Boasting high resolution, the product achieves a unidirectional repeatability of ±2 nm.

Application field

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

High-Stiffness Drive System

The drive system features high stiffness and a large dynamic range, enabling high-speed motion control even under heavy loads.

PJ3006 Dual-Axis High-Dynamic Piezo Flexure Stage

Download