Nanopositioning Piezo Flexure Stages - Piezoelectric Actuation- Piezoelectric Actuation- 安徽见行科技有限公司

Supports multi-axis motion, incorporates built-in high-precision capacitive sensors for nanoscale position control, and enables customized design.

ALL Single axis platform Dual axis table Multi axis platform Mirror stage

Closed-loop stroke: 30 µm

Linearity error: 0.03% FS

Load resonant frequency with 100g load: 1100 Hz

Closed-Loop Stroke: 180×180 μm

Resolution: 2 nm

Built-in Capacitive Sensor

Linearity Error: 0.02% FS

Closed-Loop Stroke: 60×60 μm

Resolution: 0.4 nm

Built-in Capacitive Sensor

Linearity Error: 0.04% FS

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