Anhui Actus Technology-PJ3203 XY-Axis Eccentric Piezo Stage

PJ3203 XY-Axis Eccentric Piezo Stage

Closed-loop stroke: 30 µm

Linearity error: 0.03% FS

Load resonant frequency with 100g load: 1100 Hz

Product Overview
Product Specifications
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Product Overview

• XY Two-Axis High-Dynamic Motion Stage

• Adopting a direct-drive structure and flexure hinge technology

• Built-in capacitive sensor directly measures the relative displacement between the mover and the stator

• It meets the requirements of dynamic applications such as high-speed scanning and vibration compensation

• It supports the ID chip function, and the controller is adapted to the motion stage through the ID chip

Application field

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Mask / Wafer Positioning

Scanning Microscope

Interferometry

Measurement Technology

Biotechnology

Product Features

Utilizes a flexure hinge system

The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

High-Stiffness Drive System

驱动系统刚度高，动态范围大，可在大负载下实现高速运动控制。

PJ3203 XY-Axis Eccentric Piezo Stage

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