Nanopositioning Piezo Flexure Stages - Piezoelectric Actuation- Piezoelectric Actuation- 安徽见行科技有限公司

Supports multi-axis motion, incorporates built-in high-precision capacitive sensors for nanoscale position control, and enables customized design.

ALL Single axis platform Dual axis table Multi axis platform Mirror stage

Closed-Loop Stroke: 100μm / 500μm optional

Resolution: Up to 0.5nm

Built-in Capacitive Sensor

Linearity Error: 0.02% FS

Closed-Loop Stroke: 15μm

Resolution: 0.3nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

Closed-Loop Stroke: 15μm

Resolution: 0.5nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

Closed-Loop Stroke: 250 µm

Resolution: 0.3 nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

Closed-Loop Stroke: 100μm

Resolution: 1nm

Linearity Error: 0.03% FS

Embedded mounting hole design

Closed-Loop Stroke: 200 μm

Resolution: 1 nm

Built-in Capacitive Sensor Linearity: 0.03% FS

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