Anhui Actus Technology-PJ2025-Z-Axis Piezo Flexure Stage

PJ2025 Z-Axis Piezo Flexure Stage

Nanometer-level position control、 Built-in high-precision capacitive displacement sensor、 Precision vertical positioning

Flexure hinge guidance ensures wear-free operation and requires no maintenance.

It adopts a flexure hinge amplification mechanism optimized through finite element analysis (FEA).

Its compact design makes it suitable for integrated systems with limited space.

A capacitive sensor directly measures the relative displacement between the stator and the mover, resulting in higher precision.

Product Overview
Product Specifications
Download materials

Product Overview

• The PJ2025 is a high-precision, single-axis (Z-direction) nano-positioning stage.

• It supports customization of travel ranges, which cover 50~250 μm.

• Incorporating a built-in capacitive sensor, it achieves a linearity of 0.02% FS under closed-loop motion.

• Through an internal amplification mechanism, it features a compact structure while delivering a large travel range.

Application field

Nanopositioning

Semiconductor Technology

Interferometry

Microscopy Imaging

Biotechnology

Nanopositioning

Semiconductor Technology

Interferometry

Microscopy Imaging

Biotechnology

Product Features

Utilizes a flexure hinge system

The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ2025-Z-Axis Piezo Flexure Stage

Download