Anhui Actus Technology-PJ12015 Compact High-Dynamic Single-Axis Piezo Flexure Stage

PJ12015 Compact High-Dynamic Single-Axis Piezo Flexure Stage

Nanometer-level position control、 Built-in high-precision capacitive displacement sensor 、Millisecond response time

High dynamic performance meets high-frequency motion requirements.

Compact size for easy installation in confined spaces.

Featuring a flexure hinge design, it ensures wear-free operation and requires no maintenance.

Capacitive sensors directly measure the relative displacement between the stator and mover, resulting in higher precision.

Product Overview
Product Specifications
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Product Overview

• The PJ12015 is a compact, single-axis (X-direction) piezoelectric stage.

• It features a direct-drive internal design, resulting in a high resonant frequency.

• It incorporates a built-in capacitive sensor, boasting a unidirectional repeatability of 2 nm.

•It offers versatile mounting options, including horizontal, vertical, and inverted orientations.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ12015 Compact High-Dynamic Single-Axis Piezo Flexure Stage

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