Anhui Actus Technology-PJ511-3XYZ Three-Axis Piezo Flexure Stage

PJ511-3 XYZ Three-Axis Piezo Flexure Stage

Multi-axis parallel motion Nanometer-level position control Built-in high-precision capacitive sensor

The Z-axis features high dynamic response with a no-load resonance frequency exceeding 2000Hz.

It supports the ID chip function, eliminating the need for recalibration when replacing motion stage components.

High linear accuracy: The linear error of the X/Y axes is 0.02%FS, and that of the Z axis is 0.15%FS.

The capacitive sensor directly measures the relative displacement between the moving and fixed stators, ensuring higher precision.

Product Overview
Product Specifications
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Product Overview

• The closed-loop stroke of the X and Y axes is 100µm, and that of the Z axis is 15µm.

• Three-axis parallel hollow structure, facilitating optical path penetration and suitable for optical applications.

• Built-in capacitive sensor enables nanoscale resolution.

Application field

Microscopy Imaging

3D Micro/Nano Printing

Surface Inspection

Microscopy Imaging

3D Micro/Nano Printing

Surface Inspection

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ511-3 XYZ Three-Axis Piezo Flexure Stage

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