Anhui Actus Technology-PJ6024 Hollow Three-Axis Piezo Flexure Tip-Tilt Stage

PJ6024 Hollow Three-Axis Piezo Flexure Tip-Tilt Stage

Z, Rx, Ry three-axis motion Nanometer-level position control Built-in high-precision capacitive sensor

The PJ6024 offers a strong load-carrying capacity with a maximum load of 3.5 kg.

It supports the ID chip function, eliminating the need for recalibration when replacing motion stage components.

Featuring a compact design, it is suitable for integrated systems with limited space.

A capacitive sensor directly measures the relative displacement between the mover and stator, ensuring higher precision.

Product Overview
Product Specifications
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Product Overview

• The PJ6024 is a hollow three-axis piezoelectric goniometer stage.

• It adopts a flexure hinge amplification mechanism optimized through finite element analysis.

• A built-in high-precision capacitive displacement sensor provides feedback control for the stage's motion.

•The closed-loop travel in the Z direction can reach 240 µm, and the closed-loop travel in the θx and θy directions can reach 2 mrad.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ6024Hollow Three-Axis Piezo Flexure Tip-Tilt Stage

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