Anhui Actus Technology -PJ30x XYθz Multi-axis Piezo Flexure Stage

PJ30x XYθz Multi-axis Piezo Flexure Stage

Multi-axis parallel motion ,Nanometer-level position control, Built-in high-precision capacitive sensor

Flexure hinge guidance, wear-free and maintenance-free

Adopts flexure hinge amplification mechanism optimized by finite element analysis

Compact design, suitable for integrated systems with limited space

Capacitive sensor directly measures the relative displacement of stator and rotor for higher precision

Product Overview
Product Specifications
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Product Overview

• The PJ30x is a multi-axis piezoelectric stage that integrates translation and rotation.

• It is available in two-axis (X, Y) or three-axis (X, Y, θz) versions.

• Adopting a parallel kinematic design, it offers faster response speed, higher multi-axis precision, and a compact structure.

•The large through-hole design meets the requirements of various applications.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ30x XYθz Multi-axis Piezo Flexure Stage

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