Nanopositioning Piezo Flexure Stages - Piezoelectric Actuation- Piezoelectric Actuation- 安徽见行科技有限公司

Supports multi-axis motion, incorporates built-in high-precision capacitive sensors for nanoscale position control, and enables customized design.

ALL Single axis platform Dual axis table Multi axis platform Mirror stage

Closed-Loop Stroke: 100–150 μm (optional)

Maximum Tilt Angle: 2 mrad

Displacement Resolution: 1 nm

Angular Resolution: 0.2 μrad

Linearity Error: 0.03% FS

Closed-Loop Z-Axis Stroke: 240 μm

Closed-Loop Rx, Ry Stroke: 2 mrad

Resolution: 2 nm

Built-in Capacitive Sensor

X, Y Closed-Loop Stroke: 100μm

Z-Axis Closed-Loop Stroke: 15μm

Three-Axis Hollow Design

Nanometer-Level Resolution

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