Nanopositioning Piezo Flexure Stages - Piezoelectric Actuation- Piezoelectric Actuation- 安徽见行科技有限公司

Supports multi-axis motion, incorporates built-in high-precision capacitive sensors for nanoscale position control, and enables customized design.

ALL Single axis platform Dual axis table Multi axis platform Mirror stage

Maximum Stroke: 400 μm

Resolution: 1 nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

Closed-Loop Stroke: 220 μm

Resolution: 2 nm

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

80 µm Closed-Loop Stroke

0.3 nm Resolution

Built-in Capacitive Sensor

Linearity Error: 0.03% FS

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