Anhui Actus Technology-PJ712-C Symmetric High-Load Objective Scanner

PJ712-C Symmetric High-Load Objective Scanner

Nanometer-level position control Built-in high-precision capacitive displacement sensor Millisecond response time

Large closed-loop stroke and high load-carrying capacity.

Adopts a high-stiffness flexure hinge amplification mechanism to ensure high dynamic performance and load-bearing capacity.

The capacitive sensor directly measures the relative displacement between the moving and fixed stators, achieving higher precision.

It can match different objectives by changing the fixed thread size.

Product Overview
Product Specifications
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Product Overview

• PJ712-C is a one-dimensional Z-axis objective scanning stage commonly used for high-load and long-stroke applications.

• It adopts a flexure hinge design and a parallel guiding mechanism.

• It maintains ultra-high focusing stability even under long-stroke conditions.

• The stroke is customizable to meet different application requirements.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

Super-Resolution Microscope

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ712-C Symmetric High-Load Objective Scanner

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