Anhui Actus Technology - PJ71x Long-Travel Objective Scanner (Stroke options: 100 μm to 400 μm)

PJ71x Long-Travel Objective Scanner

Nanometer-level position control Built-in high-precision capacitive sensor High-precision positioning and scanning for microscope objectives

Wide stroke selection range, covering different strokes from 100μm to 400μm.

Nanoscale resolution and high-speed dynamic response capability.

The surface adopts black anodization, and the mounting surface is subjected to conductive treatment.

Compact internal structure and small volume.

Product Overview
Product Specifications
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Product Overview

• The PJ71x series is a long-stroke objective scanning stage.

• Standard models include various versions with different strokes ranging from 100μm to 400μm.

• It adopts a flexure hinge design and parallel guiding mechanism.

• It can match different objectives by changing the fixed thread size.

Application field

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

超高分辨率显微镜

Auto Focus System

Interferometry

Measurement Technology

Semiconductor Inspection

Confocal Microscope

超高分辨率显微镜

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ71x Long-Travel Objective Scanner

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