Anhui Actus Technology-PJ721-High-Load Objective Scanner

PJ721 High-Load Objective Scanner

Nanometer-level position control Built-in high-precision capacitive sensor Long-stroke, high-dynamic scanning system for heavy objectives

High resonance frequency, meeting the requirements of fast scanning.

Built-in high-precision capacitive sensor with high resolution.

The fixed threaded holes can be customized as separate or integrated type.

The surface adopts black anodization, and the mounting surface is subjected to conductive treatment.

Product Overview
Product Specifications
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Product Overview

• PJ721 is a high-load objective scanning stage.

• Its load capacity can reach 600g.

• It adopts a flexure hinge design with no backlash.

• It can match different objectives by changing the fixed thread size.

Application field

Confocal Microscope

Semiconductor Inspection

Measurement Technology

Interferometry

Auto Focus System

Confocal Microscope

Semiconductor Inspection

Measurement Technology

Interferometry

Auto Focus System

Product Features

Utilizes a flexure hinge system

The use of flexure hinge guidance reduces coupling crosstalk. The flexure hinge system enables frictionless, high-precision displacement guidance, achieving nanometer-level position control. It also maintains wear-free operation even under high-frequency motion, offering an extended service life and requiring no maintenance.

Built-in high-precision capacitive displacement sensor

The built-in capacitive displacement sensor provides feedback control of the stage motion, achieving nanometer-level resolution. Compared to systems using strain gauges for feedback, it offers higher closed-loop accuracy and stiffness, enabling higher-speed position control.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

PJ721-High-Load Objective Scanner

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