New Product Release | PJ30x Series Multi axis Voltage Potential Shifting Platform
Release Date:2024-09-06 Source: View count125
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The PJ301-3r piezoelectric displacement platform from Jianxing Technology is a large load, high-precision X, Y, θ z three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, and is equipped with high-precision capacitive displacement sensors. The closed-loop stroke in the X and Y directions can reach 100 μ m, with a linearity of 0.03% FS, and the closed-loop stroke in the θ z direction can reach 2mrad. The X and Y biaxial piezoelectric displacement stage PJ3015 of the same series has a closed-loop stroke of up to 150 μ m. This type of piezoelectric displacement stage is widely used in fields such as micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, and semiconductor technology. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linear error of 0.03% FSO, a bidirectional repetitive positioning accuracy of ± 15nm, and a maximum load of 5kg.
Image: Physical product Recommended controller: PE111.3 Universal Digital Piezoelectric Controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.
Physical photo: Product supporting controller PE111.3
Diagram: Upper computer software interface
Diagram: Upper computer software interface What are the advantages of this product? 1. High performance flexible hinge system This product adopts high-performance flexible hinges to achieve frictionless high-precision displacement guidance and nanometer level position control. Even high-frequency movements will not cause wear, and it has a high service life without maintenance. 2. Hollow structure, high precision Built in high-precision capacitive displacement sensor in the hollow structure ensures the linearity and accuracy of the piezoelectric station, with a linearity of 0.03% and a bidirectional repetitive positioning accuracy of ± 15nm. 3. Support ID chip function The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.
As shown in the figure below, the PJ301-3r piezoelectric displacement stage has a load of 2.5kg and a 10 μ m step response curve (matched with controller PE111.3). The response time entering the 1% error band is 62ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate 25kHz, sliding average, sliding window 25).
Diagram: PJ301-3r voltage potential shift stage 10 μ m step response
Diagram: PJ301-3r voltage potential shift table 10 μ m step response detail diagram Main application scenarios The main application scenarios of this product include nano positioning, semiconductor technology, interferometry, microscopy imaging, and biotechnology.
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The PJ301-3r piezoelectric displacement platform from Jianxing Technology is a large load, high-precision X, Y, θ z three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, and is equipped with high-precision capacitive displacement sensors. The closed-loop stroke in the X and Y directions can reach 100 μ m, with a linearity of 0.03% FS, and the closed-loop stroke in the θ z direction can reach 2mrad. The X and Y biaxial piezoelectric displacement stage PJ3015 of the same series has a closed-loop stroke of up to 150 μ m. This type of piezoelectric displacement stage is widely used in fields such as micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, and semiconductor technology. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linear error of 0.03% FSO, a bidirectional repetitive positioning accuracy of ± 15nm, and a maximum load of 5kg.
Image: Physical product Recommended controller: PE111.3 Universal Digital Piezoelectric Controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.
Physical photo: Product supporting controller PE111.3
Diagram: Upper computer software interface
Diagram: Upper computer software interface What are the advantages of this product? 1. High performance flexible hinge system This product adopts high-performance flexible hinges to achieve frictionless high-precision displacement guidance and nanometer level position control. Even high-frequency movements will not cause wear, and it has a high service life without maintenance. 2. Hollow structure, high precision Built in high-precision capacitive displacement sensor in the hollow structure ensures the linearity and accuracy of the piezoelectric station, with a linearity of 0.03% and a bidirectional repetitive positioning accuracy of ± 15nm. 3. Support ID chip function The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.
As shown in the figure below, the PJ301-3r piezoelectric displacement stage has a load of 2.5kg and a 10 μ m step response curve (matched with controller PE111.3). The response time entering the 1% error band is 62ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate 25kHz, sliding average, sliding window 25).
Diagram: PJ301-3r voltage potential shift stage 10 μ m step response
Diagram: PJ301-3r voltage potential shift table 10 μ m step response detail diagram Main application scenarios The main application scenarios of this product include nano positioning, semiconductor technology, interferometry, microscopy imaging, and biotechnology.
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