New Product Release | PJ12015-S Miniature Uniaxial Voltage Shifting Platform

Release Date:2024-10-09  Source:  View count74

Jianxing Technology PJ12015-S Micro Uniaxial Piezoelectric Displacement Platform is a high-precision one-dimensional X-direction nano motion platform. Adopting a flexible hinge amplification mechanism optimized through finite element analysis, with a motion open-loop stroke of 20 μ m and a closed-loop stroke of 15 μ m, it can be widely used in micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology and other fields. This product has a built-in capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linearity of 0.03%, with unidirectional and bidirectional repeat positioning accuracies of 1nm and 3nm, respectively.

 

 

Image: Physical product

 

Recommended controller:

PE101 single axis digital piezoelectric controller, which integrates capacitance sensor measurement circuit, supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc.

Physical photo: Product supporting controller PE101

Diagram: Upper computer software interface

What are the advantages of this product?

1. High performance flexible hinge system

This product adopts high-performance flexible hinges to achieve frictionless high-precision displacement guidance, nanometer level position control, and will not wear under high-frequency motion, with a high service life and no maintenance required.

2. Compact structure and high precision

Built in capacitive displacement sensor in a compact size ensures the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is 0.03%, and the unidirectional and bidirectional repetitive positioning accuracy reach 1nm and 3nm, respectively.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Diagram: Main Technical Parameters

The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.

As shown in the figure below, the PJ12015-S piezoelectric displacement stage has a load of 120g and a 10 μ m step response curve (with controller PE101). The response time to enter the 0.5% error band is 30ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate 25kHz).

 

Diagram: PJ12015-S voltage potential shift stage 10 μ m step response

Main application scenarios

The main application scenarios of this product include nano positioning, semiconductor technology, interferometry, microscopy imaging, and biotechnology.

 

 

Jianxing Technology PJ12015-S Micro Uniaxial Piezoelectric Displacement Platform is a high-precision one-dimensional X-direction nano motion platform. Adopting a flexible hinge amplification mechanism optimized through finite element analysis, with a motion open-loop stroke of 20 μ m and a closed-loop stroke of 15 μ m, it can be widely used in micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology and other fields. This product has a built-in capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linearity of 0.03%, with unidirectional and bidirectional repeat positioning accuracies of 1nm and 3nm, respectively.

 

 

Image: Physical product

 

Recommended controller:

PE101 single axis digital piezoelectric controller, which integrates capacitance sensor measurement circuit, supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc.

Physical photo: Product supporting controller PE101

Diagram: Upper computer software interface

What are the advantages of this product?

1. High performance flexible hinge system

This product adopts high-performance flexible hinges to achieve frictionless high-precision displacement guidance, nanometer level position control, and will not wear under high-frequency motion, with a high service life and no maintenance required.

2. Compact structure and high precision

Built in capacitive displacement sensor in a compact size ensures the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is 0.03%, and the unidirectional and bidirectional repetitive positioning accuracy reach 1nm and 3nm, respectively.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Diagram: Main Technical Parameters

The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.

As shown in the figure below, the PJ12015-S piezoelectric displacement stage has a load of 120g and a 10 μ m step response curve (with controller PE101). The response time to enter the 0.5% error band is 30ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate 25kHz).

 

Diagram: PJ12015-S voltage potential shift stage 10 μ m step response

Main application scenarios

The main application scenarios of this product include nano positioning, semiconductor technology, interferometry, microscopy imaging, and biotechnology.