New Product Release | PJ2222 Single Axis High Load Piezoelectric Flexible hinge Platform
Release Date:2024-10-29 Source: View count115
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The PJ2222 single axis high load piezoelectric flexible hinge platform of Jianxing Technology is a high-precision one-dimensional Z-direction nano motion platform. It adopts a flexible hinge amplification mechanism optimized by finite element analysis, with a motion open-loop stroke of 300 μ m, closed-loop stroke of 220 μ m, and closed-loop resolution of 1nm. It can be widely used in micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology and other occasions. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The linearity of the product reaches 0.02%, and the unidirectional and bidirectional repeat positioning accuracies reach ± 4nm and ± 10nm, respectively.
Image: Physical product Recommended controller: PE101 single axis digital piezoelectric controller, which integrates capacitance sensor measurement circuit, supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc. High precision control of the flexible hinge displacement table can be achieved.
Physical photo: Product supporting controller PE101
Diagram: Upper computer software interface
What are the advantages of this product? 1. High performance flexible hinge system This product uses high-performance flexible hinges to achieve nanoscale position control, and the flexible hinge guidance requires no maintenance, friction, wear, or lubrication. Their rigidity enables high load capacity and is insensitive to impact and vibration. Has a high service life and does not require maintenance. 2. Compact structure and high precision Built in high-precision capacitive displacement sensor in a compact size ensures the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is 0.02%, and the unidirectional and bidirectional repetitive positioning accuracy reach ± 4nm and ± 10nm, respectively. 3. Support ID chip function The ID chip inside the piezoelectric displacement table contains its control parameters, and the controller identifies and adapts the piezoelectric displacement table through the ID chip. Therefore, replacing the displacement table does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.
As shown in the figure below, the PJ2222 voltage potential shift table has a load of 2.5kg and a 22 μ m step response curve (with controller PE101). The response time to enter the 1% error band is within 36ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate of 25kHz).
Diagram: PJ2222 voltage potential shift stage 22 μ m step response Main application scenarios The main application scenarios of this product include sample scanni
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The PJ2222 single axis high load piezoelectric flexible hinge platform of Jianxing Technology is a high-precision one-dimensional Z-direction nano motion platform. It adopts a flexible hinge amplification mechanism optimized by finite element analysis, with a motion open-loop stroke of 300 μ m, closed-loop stroke of 220 μ m, and closed-loop resolution of 1nm. It can be widely used in micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology and other occasions. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The linearity of the product reaches 0.02%, and the unidirectional and bidirectional repeat positioning accuracies reach ± 4nm and ± 10nm, respectively.
Image: Physical product Recommended controller: PE101 single axis digital piezoelectric controller, which integrates capacitance sensor measurement circuit, supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc. High precision control of the flexible hinge displacement table can be achieved.
Physical photo: Product supporting controller PE101
Diagram: Upper computer software interface
What are the advantages of this product? 1. High performance flexible hinge system This product uses high-performance flexible hinges to achieve nanoscale position control, and the flexible hinge guidance requires no maintenance, friction, wear, or lubrication. Their rigidity enables high load capacity and is insensitive to impact and vibration. Has a high service life and does not require maintenance. 2. Compact structure and high precision Built in high-precision capacitive displacement sensor in a compact size ensures the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is 0.02%, and the unidirectional and bidirectional repetitive positioning accuracy reach ± 4nm and ± 10nm, respectively. 3. Support ID chip function The ID chip inside the piezoelectric displacement table contains its control parameters, and the controller identifies and adapts the piezoelectric displacement table through the ID chip. Therefore, replacing the displacement table does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate 100Hz) when the piezoelectric stage moves up a 1nm step.
As shown in the figure below, the PJ2222 voltage potential shift table has a load of 2.5kg and a 22 μ m step response curve (with controller PE101). The response time to enter the 1% error band is within 36ms. The curve in the figure shows the displacement output of the internal capacitive sensor of the piezoelectric station (sampling rate of 25kHz).
Diagram: PJ2222 voltage potential shift stage 22 μ m step response Main application scenarios The main application scenarios of this product include sample scanni
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