New Product Release | PL200-6 Inchworm Piezoelectric Motor
Release Date:2025-12-30 Source: View count38
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Jianxing Technology's PL200-6 piezoelectric micro stepper motor is a one-dimensional Z-direction nano motion motor with a compact structure, fast response speed, and multi-channel synchronous control. This product has an open-loop motion stroke of over 6mm (customizable stroke), a driving force of over 50N (customizable up to 300N), and a holding force of up to 100N. It can be widely used in precision adjustment of lithography machine lenses, microscopes, semiconductors, and precision manufacturing.
Motor motion animation Recommended controller: PE601 inchworm piezoelectric motor controller, used for controlling inchworm piezoelectric motors, with built-in grating sensor circuit, can achieve high-precision feedback; Supports open-loop working mode, with two motion modes available: fast mode and high-precision mode; Compatible with high-voltage amplification function, with rich communication interfaces including RS422, Ethernet, etc. Can be used in conjunction with customized upper computer software, which has clear pages, convenient operation and interaction, and visualized motion status images and data.
Physical photo: Product supporting controller PE601
Diagram: Upper computer software interface
01. Sub nanometer resolution and nanometer precision By alternating the movement directions of piezoelectric ceramics, the output end is pushed forward. In fast mode, the single step distance can reach 4 μ m, and in high-precision mode, the resolution can reach 1nm.
Diagram: 1nm displacement of motor in high-precision mode (measured by external capacitive sensor, sampling rate 100Hz) 02. High retention and driving force When the inchworm piezoelectric motor is placed horizontally and the output shaft moves in a static direction, it can carry a maximum load of 10kg; The motor can carry a maximum load of 5kg during operation. 03. Large stroke and power-off self-locking characteristics The inchworm piezoelectric motor can achieve linear travel from micrometers to millimeters through step-by-step accumulation while maintaining nanometer level accuracy; And it can self lock and maintain its position during power outage or stoppage, reducing position drift after power outage.
Main technical parameters Main application scenarios 01 Precision adjustment of lithography machine lens: (1) Laser frequency stabilization and beam control; (2) Adaptive optics (AO); (3) Interference measurement and holography. 02 Microscopic Imaging and Biotechnology: (1) Confocal microscope; (2) Super resolution microscope (STED/PALM); (3) Atomic Force Microscopy (AFM). 03 Semiconductors and Precision Manufacturing: (1) Photolithography and wafer inspection; (2) Micro nano processing (FIB/E-beam).
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Jianxing Technology's PL200-6 piezoelectric micro stepper motor is a one-dimensional Z-direction nano motion motor with a compact structure, fast response speed, and multi-channel synchronous control. This product has an open-loop motion stroke of over 6mm (customizable stroke), a driving force of over 50N (customizable up to 300N), and a holding force of up to 100N. It can be widely used in precision adjustment of lithography machine lenses, microscopes, semiconductors, and precision manufacturing.
Motor motion animation Recommended controller: PE601 inchworm piezoelectric motor controller, used for controlling inchworm piezoelectric motors, with built-in grating sensor circuit, can achieve high-precision feedback; Supports open-loop working mode, with two motion modes available: fast mode and high-precision mode; Compatible with high-voltage amplification function, with rich communication interfaces including RS422, Ethernet, etc. Can be used in conjunction with customized upper computer software, which has clear pages, convenient operation and interaction, and visualized motion status images and data.
Physical photo: Product supporting controller PE601
Diagram: Upper computer software interface
01. Sub nanometer resolution and nanometer precision By alternating the movement directions of piezoelectric ceramics, the output end is pushed forward. In fast mode, the single step distance can reach 4 μ m, and in high-precision mode, the resolution can reach 1nm.
Diagram: 1nm displacement of motor in high-precision mode (measured by external capacitive sensor, sampling rate 100Hz) 02. High retention and driving force When the inchworm piezoelectric motor is placed horizontally and the output shaft moves in a static direction, it can carry a maximum load of 10kg; The motor can carry a maximum load of 5kg during operation. 03. Large stroke and power-off self-locking characteristics The inchworm piezoelectric motor can achieve linear travel from micrometers to millimeters through step-by-step accumulation while maintaining nanometer level accuracy; And it can self lock and maintain its position during power outage or stoppage, reducing position drift after power outage.
Main technical parameters Main application scenarios 01 Precision adjustment of lithography machine lens: (1) Laser frequency stabilization and beam control; (2) Adaptive optics (AO); (3) Interference measurement and holography. 02 Microscopic Imaging and Biotechnology: (1) Confocal microscope; (2) Super resolution microscope (STED/PALM); (3) Atomic Force Microscopy (AFM). 03 Semiconductors and Precision Manufacturing: (1) Photolithography and wafer inspection; (2) Micro nano processing (FIB/E-beam).
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