New Product Release | PJ511-3 Triaxial Voltage Potential Shifting Platform

Release Date:2025-08-22  Source:  View count272

The PJ511-3 piezoelectric displacement platform from Jianxing Technology is a high-precision X, Y, Z three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, and is equipped with high-precision capacitive displacement sensors to achieve nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. X. The closed-loop stroke in the Y direction can reach 100 μ m, and the closed-loop stroke in the Z direction is 10 μ m.         

The Z-axis no-load resonance frequency of PJ511-3 piezoelectric station is as high as 2200Hz. With its high precision, fast response, nanometer resolution, and multi degree of freedom motion capability, it is widely used in fields such as confocal microscopy, AFM atomic force microscopy, semiconductor and precision manufacturing.

Image: Physical product

Recommended controller:

PE111 universal digital piezoelectric controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.

Physical photo: Product supporting controller PE111

Diagram: Upper computer software interface

Diagram: Upper computer software interface

What are the advantages of this product?

1. Adopting high-performance flexible hinge system

Flexible hinges achieve frictionless high-precision displacement guidance, enabling nanoscale position control, while also avoiding wear and tear under high-frequency motion, with a high service life and no maintenance required.

2. Featuring a hollow structure and high precision

This product is equipped with a built-in capacitive displacement sensor, ensuring the linearity and accuracy of the piezoelectric station. The linear error of the piezoelectric station in the X and Y axes is 0.03% FS, and the unidirectional repeatability in all three axes reaches ± 2nm.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Diagram: Main Technical Parameters

In closed-loop control mode, test the time required for the piezoelectric station to stabilize to a ± 1% error band (± 100nm) with a 10 μ m step on the X-axis and Y-axis (10% of the full stroke). The piezoelectric station carries a load of 440g, and the internal sensors of the piezoelectric station collect data (25ksps sampling, sliding average, sliding window 25 points), obtaining an X-axis step time of 17ms and a Y-axis step time of 17ms.

Diagram: Overall image of X-axis step response

Diagram: Local image of X-axis step response

Diagram: Overall image of Y-axis step response

Illustration: Local image of Y-axis step response

In closed-loop control mode, test the time required for the Z-axis of the piezoelectric station to reach a 1 μ m step (10% of the full stroke) and stabilize to a ± 1% error band (± 10nm). The piezoelectric station carries a load of 440g, and the internal sensors of the piezoelectric station collect data (25ksps sampling, sliding average, sliding window 25 points), obtaining a Z-axis step time of 22ms.

 

Diagram: Overall image of Z-axis step response

Diagram: Local image of Z-axis step response

Main application scenarios

01 Optics and Photonics:

(1) Laser frequency stabilization and beam control; (2) Adaptive optics (AO); (3) Interference measurement and holography.

02 Microscopic Imaging and Biotechnology:

(1) Confocal microscope; (2) Super resolution microscope (STED/PALM); (3) Atomic Force Microscopy (AFM).

03 Semiconductors and Precision Manufacturing:

(1) Photolithography and wafer inspection; (2) Micro nano processing (FIB/E-beam).

 

 

 

The PJ511-3 piezoelectric displacement platform from Jianxing Technology is a high-precision X, Y, Z three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, and is equipped with high-precision capacitive displacement sensors to achieve nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. X. The closed-loop stroke in the Y direction can reach 100 μ m, and the closed-loop stroke in the Z direction is 10 μ m.         

The Z-axis no-load resonance frequency of PJ511-3 piezoelectric station is as high as 2200Hz. With its high precision, fast response, nanometer resolution, and multi degree of freedom motion capability, it is widely used in fields such as confocal microscopy, AFM atomic force microscopy, semiconductor and precision manufacturing.

Image: Physical product

Recommended controller:

PE111 universal digital piezoelectric controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.

Physical photo: Product supporting controller PE111

Diagram: Upper computer software interface

Diagram: Upper computer software interface

What are the advantages of this product?

1. Adopting high-performance flexible hinge system

Flexible hinges achieve frictionless high-precision displacement guidance, enabling nanoscale position control, while also avoiding wear and tear under high-frequency motion, with a high service life and no maintenance required.

2. Featuring a hollow structure and high precision

This product is equipped with a built-in capacitive displacement sensor, ensuring the linearity and accuracy of the piezoelectric station. The linear error of the piezoelectric station in the X and Y axes is 0.03% FS, and the unidirectional repeatability in all three axes reaches ± 2nm.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Diagram: Main Technical Parameters

In closed-loop control mode, test the time required for the piezoelectric station to stabilize to a ± 1% error band (± 100nm) with a 10 μ m step on the X-axis and Y-axis (10% of the full stroke). The piezoelectric station carries a load of 440g, and the internal sensors of the piezoelectric station collect data (25ksps sampling, sliding average, sliding window 25 points), obtaining an X-axis step time of 17ms and a Y-axis step time of 17ms.

Diagram: Overall image of X-axis step response

Diagram: Local image of X-axis step response

Diagram: Overall image of Y-axis step response

Illustration: Local image of Y-axis step response

In closed-loop control mode, test the time required for the Z-axis of the piezoelectric station to reach a 1 μ m step (10% of the full stroke) and stabilize to a ± 1% error band (± 10nm). The piezoelectric station carries a load of 440g, and the internal sensors of the piezoelectric station collect data (25ksps sampling, sliding average, sliding window 25 points), obtaining a Z-axis step time of 22ms.

 

Diagram: Overall image of Z-axis step response

Diagram: Local image of Z-axis step response

Main application scenarios

01 Optics and Photonics:

(1) Laser frequency stabilization and beam control; (2) Adaptive optics (AO); (3) Interference measurement and holography.

02 Microscopic Imaging and Biotechnology:

(1) Confocal microscope; (2) Super resolution microscope (STED/PALM); (3) Atomic Force Microscopy (AFM).

03 Semiconductors and Precision Manufacturing:

(1) Photolithography and wafer inspection; (2) Micro nano processing (FIB/E-beam).