PL200-6 Inchworm Piezoelectric Motor
Sub-nanometer resolution and nanometer-level precision High thrust force and high static holding force Large stroke

Stroke up to 6 mm (customizable)

Resolution up to 1 nm

Holding Force: 100 N

Driving Force: 50 N

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Product Overview

• Compact structure with customizable overall dimensions

• Supports a large stroke range with customizable stroke

• Features high thrust force and high static holding force

Product Features
Inchworm Piezoelectric Motor
Through the alternating coordination of piezoelectric ceramics in different motion directions, the output end is advanced forward. In high-precision mode, the single-step size can reach 4 μm with a resolution of 1 nm.
High holding force and driving force
When the inchworm piezoelectric motor is horizontally positioned and the output shaft is stationary, it can support a maximum load of 10 kg. During motion, the motor can support a maximum load of 5 kg.
Supports ID chip function

The ID chip inside the motion stage contains the servo control parameters of the motor. The controller identifies and adapts to the motor through the ID chip, eliminating the need for recalibration when replacing motor components.



  • PL200-6 Inchworm Piezoelectric Motor