PE501 Piezo Ultrasonic Rotation Stage Controller

High-precision grating sensor enables high-precision feedback control.

The control software offers an excellent interactive experience for quick setup.

Supports more flexible motor control via a dedicated instruction set.

Supports motor motion control using external trigger signals.

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Product Overview

• Integrated Grating Sensor Measurement Circuit

• Supports motor motion control via external trigger

• Supports the function of the ID memory chip

Product Features
High-precision feedback control
Closed-loop control of the piezoelectric ultrasonic rotation stage can be achieved, with the high-precision grating sensor enabling nanometer-level feedback control.
Trigger Mode

The controller provides an SMA interface and supports TTL level (3.3V) for drive control. This method enhances the efficient transmission of control and feedback signals while improving the system's anti-interference capability.


Supports ID chip function
The ID chip inside the piezo motor contains the control parameters of the motor. The controller identifies the piezoelectric ultrasonic rotation stage through the ID chip.
User-friendly control software


The control software offers an excellent user experience with quick onboarding.

The software provides both open-loop and closed-loop control modes. In closed-loop mode, it supports closed-loop single-step motion, closed-loop equal-step motion, and closed-loop angle-setting motion.

The angle display window shows real-time angular displacement information of the rotation stage, enhancing visualization of the rotary table's movement.





  • PE501 Piezo Ultrasonic Rotation Stage Controller