PE211 Piezo Inertial Stage Controller

High-precision grating sensor enables nanoscale feedback control.

The control software offers an excellent interactive experience for quick setup.

Supports dedicated command set for more flexible motor control.

  • Product Overview
  • Product Specifications
  • Download materials
Product Overview

• Integrated Grating Sensor Measurement Circuit

• Operating frequency of approximately 3kHz

• Sawtooth wave drive, driving voltage 0~120V

• Supports ID memory chip function

Product Features
User-friendly control software
The control software offers an excellent user experience with quick onboarding. It supports the upload, editing, and saving of user-defined waveforms. The waveform display window shows real-time displacement information from the grating sensor, enhancing visualization of stage movement.
High-precision feedback control
Closed-loop control of the piezoelectric inertial motor can be achieved, with the high-precision grating sensor enabling nanometer-level feedback control.
Supports ID chip function
The ID chip inside the piezo motor contains the motor's control parameters. The controller identifies and adapts to the piezo motor through the ID chip.
Dedicated command set

In addition to being controlled via dedicated software, the piezoelectric inertial motor can also be operated more flexibly using a dedicated command set.



  • PE211 Piezo Inertial Motor Controller