User-friendly control software
The control software offers an excellent user experience with quick onboarding. It supports the upload, editing, and saving of user-defined waveforms. The waveform display window shows real-time displacement information from the grating sensor, enhancing visualization of stage movement.
High-precision feedback control
Closed-loop control of the piezoelectric inertial motor can be achieved, with the high-precision grating sensor enabling nanometer-level feedback control.
Supports ID chip function
The ID chip inside the piezo motor contains the motor's control parameters. The controller identifies and adapts to the piezo motor through the ID chip.
Dedicated command set
In addition to being controlled via dedicated software, the piezoelectric inertial motor can also be operated more flexibly using a dedicated command set.