New Product Release | PJ6024 Hollow Triaxial Piezoelectric Pendulum

Release Date:2025-04-03  Source:  View count169

The PJ6024 piezoelectric deflection platform from Jianxing Technology is a high-precision Z, θ x, θ y three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, with a closed-loop stroke of 240 μ m in the Z direction and 2mrad in the θ x and θ y directions. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linear error of 0.03% FS, a Z-axis bidirectional repetitive positioning accuracy of ± 15nm, and a θ x and θ y axis bidirectional repetitive positioning accuracy of ± 0.5 μ rad, with a maximum load of 3.5kg. The PJ6024 hollow three-axis piezoelectric swing table, with its high precision, fast response, nanometer level resolution, and multi degree of freedom motion capability, can be widely used in fields such as optics and photonics, microscopy imaging and biotechnology, semiconductors and precision manufacturing.

 

 

Image: Physical product

Recommended controller:

PE111 universal digital piezoelectric controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.

Physical photo: Product supporting controller PE111

Diagram: Upper computer software interface

Diagram: Upper computer software interface

 

What are the advantages of this product?

1. Adopting high-performance flexible hinge system

Flexible hinges achieve frictionless high-precision displacement guidance, enabling nanoscale position control, while also avoiding wear and tear under high-frequency motion, with a high service life and no maintenance required.

2. Having a hollow structure and high precision

Built in high-precision capacitive displacement sensor ensures the linearity and accuracy of the piezoelectric station, with a linear error of 0.03% FS, and can still maintain this accuracy under a maximum load of 3.5kg.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Main technical parameters

In closed-loop control mode, test the time required for the Rx and Ry axis displacements of the piezoelectric station to stabilize at ± 1% error band (± 0.2 μ rad) with a displacement of 20 μ rad, as well as the time required for the Z-axis displacement to stabilize at ± 1% error band (± 240nm) with a step of 24 μ m (10% of the full stroke). The piezoelectric station carries a load of 2.8kg, and the internal sensor of the piezoelectric station collects data at 25ksps. The Rx axis step time is 44ms, the Ry axis step time is 42ms, and the Z-axis step time is 44ms.

 

Diagram: Overall image of Rx axis step response

Illustration: Local image of Rx axis step response

Diagram: Overall image of Ry axis step response

Diagram: Local image of Ry axis step response

Diagram: Overall image of Z-axis step response

Diagram: Local image of Z-axis step response

Main application scenarios

01 Optics and Photonics:

(1) Laser frequency stabilization and beam control;

(2) Adaptive optics (AO);

(3) Interference measurement and holography.

02 Microscopic Imaging and Biotechnology:

(1) Confocal microscope;

(2) Super resolution microscope (STED/PALM);

(3) Atomic Force Microscopy (AFM).

03 Semiconductors and Precision Manufacturing:

(1) Photolithography and wafer inspection;

(2) Micro nano processing (FIB/E-beam).

 

 

 

 

The PJ6024 piezoelectric deflection platform from Jianxing Technology is a high-precision Z, θ x, θ y three-dimensional hollow nano motion platform. The platform adopts a flexible hinge amplification mechanism optimized by finite element analysis, with a closed-loop stroke of 240 μ m in the Z direction and 2mrad in the θ x and θ y directions. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product has a linear error of 0.03% FS, a Z-axis bidirectional repetitive positioning accuracy of ± 15nm, and a θ x and θ y axis bidirectional repetitive positioning accuracy of ± 0.5 μ rad, with a maximum load of 3.5kg. The PJ6024 hollow three-axis piezoelectric swing table, with its high precision, fast response, nanometer level resolution, and multi degree of freedom motion capability, can be widely used in fields such as optics and photonics, microscopy imaging and biotechnology, semiconductors and precision manufacturing.

 

 

Image: Physical product

Recommended controller:

PE111 universal digital piezoelectric controller, which integrates capacitance sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It has rich communication interfaces, including RS422, USB, Ethernet, etc. The controller consists of multiple submodules, and the number of channels can be adjusted by combining different modules. It supports up to 6 channels and can also choose piezoelectric controller or high-voltage driver mode.

Physical photo: Product supporting controller PE111

Diagram: Upper computer software interface

Diagram: Upper computer software interface

 

What are the advantages of this product?

1. Adopting high-performance flexible hinge system

Flexible hinges achieve frictionless high-precision displacement guidance, enabling nanoscale position control, while also avoiding wear and tear under high-frequency motion, with a high service life and no maintenance required.

2. Having a hollow structure and high precision

Built in high-precision capacitive displacement sensor ensures the linearity and accuracy of the piezoelectric station, with a linear error of 0.03% FS, and can still maintain this accuracy under a maximum load of 3.5kg.

3. Support ID chip function

The ID chip inside the sports table contains the servo control parameters of the sports table. The controller identifies and adapts to the sports table through the ID chip, so replacing the sports table components does not require recalibration.

 

Main technical parameters

In closed-loop control mode, test the time required for the Rx and Ry axis displacements of the piezoelectric station to stabilize at ± 1% error band (± 0.2 μ rad) with a displacement of 20 μ rad, as well as the time required for the Z-axis displacement to stabilize at ± 1% error band (± 240nm) with a step of 24 μ m (10% of the full stroke). The piezoelectric station carries a load of 2.8kg, and the internal sensor of the piezoelectric station collects data at 25ksps. The Rx axis step time is 44ms, the Ry axis step time is 42ms, and the Z-axis step time is 44ms.

 

Diagram: Overall image of Rx axis step response

Illustration: Local image of Rx axis step response

Diagram: Overall image of Ry axis step response

Diagram: Local image of Ry axis step response

Diagram: Overall image of Z-axis step response

Diagram: Local image of Z-axis step response

Main application scenarios

01 Optics and Photonics:

(1) Laser frequency stabilization and beam control;

(2) Adaptive optics (AO);

(3) Interference measurement and holography.

02 Microscopic Imaging and Biotechnology:

(1) Confocal microscope;

(2) Super resolution microscope (STED/PALM);

(3) Atomic Force Microscopy (AFM).

03 Semiconductors and Precision Manufacturing:

(1) Photolithography and wafer inspection;

(2) Micro nano processing (FIB/E-beam).