

Closed-loop minimum step size up to 5nm, enabling precise positioning.
Bidirectional repeatability better than ±120nm, high motion consistency.
Supports 2D combination expansion, multi-axis coordination for high dynamic scanning.
Holding force up to 5N, featuring high stability.
• Stroke: 40mm, customization available.
• High load capacity, normal load up to 5kg.
• Inertial drive and grating closed-loop, suitable for high-precision linear positioning applications.
• Customized user-friendly control software with real-time displacement visualization and compatibility with diverse waveform editing.

