

Closed-loop minimum step size up to 5nm for precise positioning
Bidirectional repeatability better than ±120nm with high motion consistency
Supports 2D and 3D combined expansion, and multi-axis coordination enables high dynamic scanning
High vacuum compatible
• Stroke options: 16/36/50mm, customization available
• Inertial drive and grating closed-loop, suitable for high-precision linear positioning applications
• Compact structure with width of only 24mm and height of 12mm
• Customized user-friendly control software, featuring real-time displacement visualization and compatibility with diverse waveform editing

