PE112 Digital Chassis Piezo Controller

Supports ID chip function for interchangeability between different controllers.

Rich interfaces to meet various connection requirements.

Supports dedicated command set for easy secondary development.

Can function as a high-voltage amplifier with output voltage ranging from -20V to 130V.

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Product Overview

• Built-in capacitive sensor circuit with high-precision feedback control.

• Equipped with user-friendly control software supporting secondary development.

• Supports servo parameter self-tuning with an intuitive tuning interface.

• Modular design for flexible hardware configuration selection.

Product Features
High-precision feedback control

Capacitive sensors are used to achieve nanometer-level feedback control, with high-precision linearization algorithms reducing nonlinearity errors to below 0.01%.

Supports ID chip function

The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.

Modular design
The controller consists of multiple sub-modules, allowing the number of channels to be adjusted through different module combinations. It also offers the option to select either piezo controller or high-voltage driver mode.
User-friendly software platform

The software control platform offers an excellent user experience with quick onboarding. It provides waveform generation capabilities comparable to a signal generator, supporting the upload, editing, and saving of user-defined waveforms for rapid multi-axis synchronized custom scanning. The waveform display window shows real-time displacement information from the capacitive sensor, enhancing visualization of stage movement.



  • PE112 Digital Chassis Piezo Controller