PE101 Single-axis Digital Piezo Controller
Single-axis controller with built-in capacitive sensor circuit for high-precision feedback

High-precision feedback control with high servo control frequency

Supports multiple interface control

High integration and compact size

Supports dedicated command set for easy secondary development

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Product Overview

• Supports multiple operating modes including open-loop, closed-loop, digital control and analog control

• Compatible with high-voltage amplifier function

• Integrated capacitive sensor measurement circuit

• Rich interfaces including RS422, USB and Ethernet

Product Features
High-precision feedback control
Capacitive sensors are used to achieve nanometer-level feedback control, with high-precision linearization algorithms reducing nonlinearity errors to below 0.01%.
Supports ID chip function
The ID chip inside the stage contains the servo control parameters for the stage. The controller identifies and adapts to the stage through the ID chip, eliminating the need for recalibration when replacing stage components.
User-friendly software platform

The software control platform offers an excellent user experience with quick onboarding. It provides waveform generation capabilities comparable to a signal generator, supporting the upload, editing, and saving of user-defined waveforms. The waveform display window shows real-time displacement information from the capacitive sensor, enhancing visualization of stage movement. A PID control parameter tuning window is also provided, allowing users to quickly adjust the servo parameters of the piezo stage.



  • PE101 Single-axis Digital Piezo Controller