HEB-640 Electromagnetic parallel six degree of freedom platform
  • Product Overview
  • Product Specifications
  • Download materials
Product Overview

• Adopting DC brushless motor drive and grating measurement, it has high lifespan and reliability

• The displacement table adopts a hexapod synchronous control algorithm, which can achieve complex movements

• Compact structure, capable of executing complex six axis movements in a small space

• Provide multiple interfaces and instruction sets for easy secondary development


Application field
Semiconductor
Nano positioning
Biotechnology
Semiconductor
Nano positioning
Biotechnology


  • HEB-640电磁并联六自由度平台