New Product Release | PJ712-C Symmetrical Large Load Objective Scanning Stage
Release Date:2024-12-31 Source: View count77
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The PJ712-C symmetrical high load objective scanning platform from Jianxing Technology is a high-precision one-dimensional Z-direction nano motion platform. Adopting a flexible hinge amplification mechanism optimized through finite element analysis, the motion open-loop stroke is 280 μ m and the closed-loop stroke is 220 μ m. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product's linearity reaches 0.03% FS, and the unidirectional/bidirectional repetitive positioning accuracy reaches 3nm/10nm (3sigma), respectively.
Image: Physical product Recommended controller: The PE101-1 single axis digital piezoelectric controller integrates a capacitive sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc. High precision control of the flexible hinge displacement table can be achieved.
Diagram: Product matching controller PE101-1
Diagram: Upper computer software interface
Diagram: Upper computer software interface What are the advantages of this product? 1. Adopting high-performance flexible hinges This product adopts a symmetrical high-performance flexible hinge to achieve nanoscale position control. At the same time, the flexible hinge guide does not require maintenance, friction, wear, or lubrication. Symmetric hinges can achieve high load capacity and effectively reduce pitch and yaw during the displacement process of the hinge system, with a high service life and no maintenance required. 2. Compact structure and high precision This product is equipped with a high-precision capacitive displacement sensor in a compact size, ensuring the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is ≤ 0.03% FS, and the unidirectional/bidirectional repeat positioning accuracy reaches 3nm/10nm (3sigma) respectively. 3. Support ID chip function The ID chip inside the piezoelectric displacement table contains its control parameters, and the controller identifies and adapts the piezoelectric displacement table through the ID chip. Therefore, replacing the displacement table does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate of 100Hz) when the piezoelectric stage moves up a 10nm step.
As shown in the figure below, the PJ712-C voltage potential shift table has a load of 0.5kg and a 22 μ m step response curve (with controller PE101-1). The response time to enter the 1% error band is within 46ms. The curve in the figure shows the displacement output of the internal capacitance displacement sensor of the piezoelectric station (sampling rate of 25kHz). Diagram: PJ712-C voltage potential shift stage 22 μ m step response What are the main application scenarios? The main application scenarios of this product include: micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology, and other scenarios.
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The PJ712-C symmetrical high load objective scanning platform from Jianxing Technology is a high-precision one-dimensional Z-direction nano motion platform. Adopting a flexible hinge amplification mechanism optimized through finite element analysis, the motion open-loop stroke is 280 μ m and the closed-loop stroke is 220 μ m. This product is equipped with a high-precision capacitive displacement sensor for feedback control of the movement of the displacement stage, achieving nanometer level resolution. Compared with systems that use strain gauges for feedback, this product directly measures the relative displacement of the rotor and stator, with higher closed-loop accuracy. The product's linearity reaches 0.03% FS, and the unidirectional/bidirectional repetitive positioning accuracy reaches 3nm/10nm (3sigma), respectively.
Image: Physical product Recommended controller: The PE101-1 single axis digital piezoelectric controller integrates a capacitive sensor measurement circuit and supports multiple working modes such as open-loop, closed-loop, digital control, analog control, etc. It is compatible with high-voltage amplification function and has rich communication interfaces, including RS422, USB, Ethernet, etc. High precision control of the flexible hinge displacement table can be achieved.
Diagram: Product matching controller PE101-1
Diagram: Upper computer software interface
Diagram: Upper computer software interface What are the advantages of this product? 1. Adopting high-performance flexible hinges This product adopts a symmetrical high-performance flexible hinge to achieve nanoscale position control. At the same time, the flexible hinge guide does not require maintenance, friction, wear, or lubrication. Symmetric hinges can achieve high load capacity and effectively reduce pitch and yaw during the displacement process of the hinge system, with a high service life and no maintenance required. 2. Compact structure and high precision This product is equipped with a high-precision capacitive displacement sensor in a compact size, ensuring the linearity and accuracy of the piezoelectric station. The linearity of the piezoelectric station is ≤ 0.03% FS, and the unidirectional/bidirectional repeat positioning accuracy reaches 3nm/10nm (3sigma) respectively. 3. Support ID chip function The ID chip inside the piezoelectric displacement table contains its control parameters, and the controller identifies and adapts the piezoelectric displacement table through the ID chip. Therefore, replacing the displacement table does not require recalibration.
Diagram: Main Technical Parameters The following figure shows the output of the internal capacitive sensor (sampling rate of 100Hz) when the piezoelectric stage moves up a 10nm step.
As shown in the figure below, the PJ712-C voltage potential shift table has a load of 0.5kg and a 22 μ m step response curve (with controller PE101-1). The response time to enter the 1% error band is within 46ms. The curve in the figure shows the displacement output of the internal capacitance displacement sensor of the piezoelectric station (sampling rate of 25kHz). Diagram: PJ712-C voltage potential shift stage 22 μ m step response What are the main application scenarios? The main application scenarios of this product include: micro nano processing, sample scanning, microscopy, nano positioning, biotechnology, testing applications, semiconductor technology, and other scenarios.
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